Evaluation on Microstructure of Aluminum Alloys Dedicated to Plasma Etcher

Abstract:

Article Preview

The relationship between microstructure and anodic oxidation film on 6061 aluminum alloy dedicated to plasma etcher were mainly studied by OM, SEM and TEM. The results show that the quality of anodic oxidation film has close relationship with the microstructure of materials, the distribution of element and the morphology of secondary phases. The microstructure of foreign 6061 aluminum alloy is uniform, and there are not obviously segregation and cavity. Two kinds of secondary phases disperse over the grain, one is rich-Fe phase, and the other is Mg2Si. Certainly there are also few secondary phases distributing along the grain boundary. The sizes of all secondary phases are almost below 5mm. The size of rich-Fe phases in homemade aluminum alloys are about from 2mm to 15mm, these big-size phases will bring pin-hole defects, which form some channels sending F+ etc. into the matrix of aluminum alloy, then not only the equipment will be destroyed at last, but also products will be polluted. The evaluation on microstructure of aluminum alloy will provide scientific basis for nationalization of plasma etcher.

Info:

Periodical:

Edited by:

Enhou Han, Guanghong Lu and Xiaolin Shu

Pages:

343-349

DOI:

10.4028/www.scientific.net/MSF.689.343

Citation:

Z. H. Zhang et al., "Evaluation on Microstructure of Aluminum Alloys Dedicated to Plasma Etcher", Materials Science Forum, Vol. 689, pp. 343-349, 2011

Online since:

June 2011

Export:

Price:

$38.00

[1] Cao Lai-fa, Zhu Zheng-tan. Present Situation of Chinese Integrated Circuit. SCI/TECH Information Development & Economy: Vol. 14, No. 2(2004), P191.

[2] Hu Yuan. Gen Jinqi-Open the Dream of Homemade IC Equipment(Feature Article). 1994~2009 China Academic Journal Electronic Publishing House: P50.

[3] Li Jian-guo, Tan Hong-yan, ect. Analysis of Mg2Si precipitate in Al-Si-Mg and Al-Mg-Si alloys by FE-SEM. The Chinese Journal of Nonferrous Metals: Vol. 18, No. 10 (2008), P1819.

[4] Ke Dongjie, Cai Yingduo. Behaviour of Fe in the Al-Mg-Si Alloys. Aluminum Fabrication: Vol. 4(1990), P20.

[5] Wang Su-bei. The Harmful Influence and Control of Iron in Al-Si Alloy. Research Studies on Foundry Equipment: Vol. 5(2002), P35.

[6] Ma Shengli, Xu Kewei. The Influence on Condition of Anodic Oxidation to the form of cavity in the Anodic Oxidation film. Hot Working Technology: Vol. 6(1998), P38.

[7] ZOU Yongzhi, XU Zhenbing, etc. Crystallographic Characteristic of Intermetallic Compounds in Al-Si-Mg Casting Alloys Using Electron Backscatter Diffraction. Chinese Journal of Mechanical Engineering: Vol. 23, No. 3, 2010, P35.

DOI: 10.3901/cjme.2010.03.305

[8] M.S. Silva, C. Barbosa, etc. Effect of Chemical Composition Variation on Microstructure and Mechanical Properties of a 6060 Aluminum Alloy. Journal of Materials Engineering and Performance: Vol. 13(2), 2004. P129.

[9] Hanliang Zhu, Xinquan Zhang, etc. Effect of Initial Microstructure on Surface Appearance of Anodized Aluminum Ectrusions. Metallurgical and Materials Transactions A: Vol. 40A, 2009, P3264.

[10] Zhu Zufang, Cai Yingdu. Influence of Composition and Structure on Aluminum Alloy Anodizing Behaviour. Nonferrous Metals Processing: Vol. 3, No. 2, (2004), P31.

[11] Zhu Zufang. The Technology of Anodizing Oxidation and Surface Treatment on Aluminum Alloys: Chemical Industry Press (2004).

In order to see related information, you need to Login.