A Micro Triggered Spark Gap Switch with Three Electrodes

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A planar micro triggered spark gap switch with three electrodes was designed and fabricated based on non-silicon surface micromachining technology. It consists of two main electrodes, the shape of which is semicircle, and a triggering electrode which is a thin strip. The gap distance between two main electrodes is 800μm. Benefitting from MEMS technology, the switch is integratable and its cost has the potential to be reduced. The designed switch has been optimized and tested. It gives out a pulse current with peak of 5165.21A and 129.6ns rise time. The test data has an agreement with the simulation results.

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Periodical:

Edited by:

Ran Chen

Pages:

485-489

DOI:

10.4028/www.scientific.net/MSF.694.485

Citation:

H. Shen et al., "A Micro Triggered Spark Gap Switch with Three Electrodes", Materials Science Forum, Vol. 694, pp. 485-489, 2011

Online since:

July 2011

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Price:

$38.00

[1] H. Bluhm, Pulsed power systems: principles and applications, Berlin, Germany: Springer, (2006).

[2] Liu Jin-liang, Yin Yi, Application of a Self-breakdown Hydrogen Spark Gap Switch on High Power Pulse Modulator, Journal of Applied Physics, 2008, 104( 8): 083307-083312.

DOI: 10.1063/1.3005902

[3] J.C. Dickens, T.G. Engel, M. Kristiansen, Electrode Performance of a Three Electrode Triggered High Energy Spark Gap Switch, IEEE International Pulsed Power Conference - Digest of Technical Papers, 1993, 1: 471-474.

DOI: 10.1109/ppc.1993.513376

[4] T. -R. Hsu, MEMS & Microsystems: Design and Manufacture, Beijing, China: McGraw-Hill, 2002: 56–59.

[5] Golnabi Hossein, Comparison between the discharge development in the two- and three-electrode spark gap switches, Review of Scientific Insruments, 2000, 71 (2): 413-419.

DOI: 10.1063/1.1150216

[6] P. Seriburi, D. Kercher, M.G. Allen, An experimental study of microfabricated spark gaps: wear and erosion characteristics, Journal of Micromechanics and Microengineering, 2001, 11(3): 165-174.

DOI: 10.1088/0960-1317/11/3/302

[7] G.J.J. Winands, Z. Liu, et al, Long lifetime, triggered, spark-gap switch for repetitive pulsed power applications, Review of Scientific Insruments, 2005, 76(8): 085107-085113.

DOI: 10.1063/1.2008047

[8] K. Yan, E.J.M. van Heesch, et al, A triggered spark-gap switch for high-repetition rate high-voltage pulse generation , Journal of Electrostatics, 2003, 57(1): 29-33.

DOI: 10.1016/s0304-3886(02)00093-1

[9] Gennady A. Mesyats, Pulse Power, New York: Springer-Verlag, 2004: 315-428.

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