Sub-Bandgap Light-Induced Carrier Generation at Room Temperature in Silicon Carbide MOS Capacitors

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Carrier generation characteristics in n-type substrate SiC MOS capacitors induced by sub-bandgap energy light are reported. The generation rate is high enough to create an inversion layer in ~20 minutes with monochromatic light (front side illumination) of energy 2.1 eV in 4H-SiC for electric fields smaller than 1 MV/cm. Generation and recovery results strongly indicate involvement of a metastable defect whose efficiency as a generation center increases under hole-rich and decreases under electron-rich conditions. The generation dependence on bias history and light energy shows the defect to have properties consistent with the metastable silicon vacancy / carbon vacancy-antisite complex (VSi / Vc - CSi).

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Periodical:

Materials Science Forum (Volumes 717-720)

Edited by:

Robert P. Devaty, Michael Dudley, T. Paul Chow and Philip G. Neudeck

Pages:

441-444

Citation:

S. DasGupta et al., "Sub-Bandgap Light-Induced Carrier Generation at Room Temperature in Silicon Carbide MOS Capacitors", Materials Science Forum, Vols. 717-720, pp. 441-444, 2012

Online since:

May 2012

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$38.00

[1] V. V. Afanas'ev, F. Ciobanu, S. Dimitrijev, G. Pensl, and A. Stesmans, J. Phys.: Condens. Matter 16 (2004) S1839.

DOI: https://doi.org/10.1088/0953-8984/16/17/019

[2] J. A. Cooper, Jr., Phys. Stat. Sol. A, 162 (1997) 305.

[3] M. J. Marinella, D. K. Schroder, T. Isaacs-Smith, A. C. Ahyi, J. R. Williams, G. Y. Chung, J. W. Wan, and M. J. Loboda, Appl. Phys. Lett. 90 (2007) 253508.

DOI: https://doi.org/10.1063/1.2748327

[4] Y. Wang, J. A. Cooper, M. R. Melloch, S. T. Sheppard, J. W. Palmour, and L. A. Lipkin, J. Electron. Materials, 25, 5 (1996) 899.

[5] J. S. Kang and D. K. Schroder, Phys. Status Solidi A 89 (1985) 13.

[6] T. Lingner, S. Greulich-Weber, and J. -M. Spaeth, Mater. Sci. Forum 353-356 (2001) 505.

[7] A. Mattausch, M. Bockstedte, and O. Pankratov, Mater. Sci. Forum 353-356 (2001) 323.

[8] Alexander Mattausch, Ph.D. Thesis, University of Erlangen-Nuremberg, (2005).

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