Total Near Interface Trap Density Calculation of 4H-SiC/SiO2 Structures before and after Nitrogen Passivation


Article Preview

We compare the effect of hydrogen, nitrogen, and phosphorous passivation on total near interface trap density and mobility of 4H(0001)-SiC/SiO2 structure. The results show that nitrogen and phosphorous passivation decrease total near interface trap density by pushing the energy levels of interface traps away from the conduction band. The density of states (DOS), including interface states (Dit), are calculated for several 4H(0001)-SiC/SiO2 structures using density functional theory (DFT).



Materials Science Forum (Volumes 717-720)

Edited by:

Robert P. Devaty, Michael Dudley, T. Paul Chow and Philip G. Neudeck






S. Salemi et al., "Total Near Interface Trap Density Calculation of 4H-SiC/SiO2 Structures before and after Nitrogen Passivation", Materials Science Forum, Vols. 717-720, pp. 457-460, 2012

Online since:

May 2012




[1] G. Y. Chung, C. C. Tin, J. R. Williams, K. McDonald, M. Di Ventra, S. T. Pantelides, L. C. Feldman, and R. A. Weller, Applied Physics Letters 76 (2000) 1713-1715.

DOI: 10.1063/1.126167

[2] H. Li, S. Dimitrijev, H. Barry Harrison, and D. Sweatman, Applied Physics Letters 70 (1997) 2028-(2030).

[3] P. Jamet, S. Dimitrijev, and P. Tanner, Journal of Applied Physics 90 (2001) 5058-5063.

[4] J. W. Chai, J. S. Pan, Z. Zhang, S. J. Wang, Q. Chen, and C. H. A. Huan, Applied Physics Letters 92 (2008) 092119-1-3.

[5] K. Fukuda, S. Suzuki, and T. Tanaka, and K. Arai, Applied Physics Letters 76 (2000) 1585-1587.

[6] D. Okamoto, H. Yano, K. Hirata, T. Hatayama, T. Fuyuki, IEEE Electron Device Letters 31 (2010) 710-712.

[7] D. Okamoto, H. Yano, T. Hatayama, and T. Fuyuki, Applied Physics Letters 96 (2010) 203508-1-3.

[8] P. Giannozzi et al., Journal of Physics: Condensed. Matter 21 (2009) 1-19.

[9] C. Radtke, I. J. R. Baumvol, and J. Morais, and F. C. Stedile, Applied Physics Letters 78 (2001) 3601-3603.

In order to see related information, you need to Login.