Plasma-Based Chemical Modification of Epitaxial Graphene


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In this work, the treatment of epitaxial graphene on SiC using electron beam generated plasmas produced in mixtures of argon and oxygen is demonstrated. The treatment imparts oxygen functional groups on the surface with concentrations ranging up to about 12 at.%, depending on treatment parameters. Surface characterization of the functionalized graphene shows incorporation of oxygen to the lattice by disruption of ∏-bonds, and an altering of bulk electrical properties.



Materials Science Forum (Volumes 717-720)

Edited by:

Robert P. Devaty, Michael Dudley, T. Paul Chow and Philip G. Neudeck




S. G. Walton et al., "Plasma-Based Chemical Modification of Epitaxial Graphene", Materials Science Forum, Vols. 717-720, pp. 657-660, 2012

Online since:

May 2012




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