On the Fabrication Parameters of Buried Microchannels Integrated in In-Plane Silicon Microprobes
This paper aims the characterization of buried microchannels in silicon realized by deep reactive ion etching. The effects of dry etching parameters on the integrability into hollow microprobes are thoroughly investigated from both technological and functional aspects. Results are supposed to give physiology related probe designers a deeper insight into microfabrication-related issues.
T. Berecz, K. Májlinger, I. N. Orbulov and P. J. Szabó
Z. Fekete et al., "On the Fabrication Parameters of Buried Microchannels Integrated in In-Plane Silicon Microprobes", Materials Science Forum, Vol. 729, pp. 210-215, 2013