A Study on Spatial Resolution of the Microwave Atomic Force Microscope Imaging Affected by Scanning Speed

Abstract:

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Using the microwave atomic force microscope (M-AFM) measuring system, the sample of Au nanowires arranged on glass wafer was sensed with three kinds of scanning speed. As the results shown, the spatial resolution of topographies is increased with the decrease of scanning speed. However, the precision of microwave images is not changed much with decreasing the scanning speed. Since M-AFM with the compact microwave instrument can always implement the real time measurement, the variation of scanning speed will not affect the microwave measurement.

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Periodical:

Edited by:

Shijie Zhu, Baorong Ni and Dongying Ju

Pages:

200-203

DOI:

10.4028/www.scientific.net/MSF.750.200

Citation:

L. Zhang et al., "A Study on Spatial Resolution of the Microwave Atomic Force Microscope Imaging Affected by Scanning Speed", Materials Science Forum, Vol. 750, pp. 200-203, 2013

Online since:

March 2013

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$38.00

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