Temperature-Dependence Study of the Gate Current SiO2/4H-SiC MOS Capacitors


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We present a temperature-dependence electrical characterization of the oxide/semiconductor interface in MOS capacitors with a SiO2 layer deposited on 4H-SiC using dichlorosilane and nitrogen-based vapor precursors. The post deposition annealing process in N2O allowed to achieve an interface state density Dit  9.0×1011cm-2eV-1 below the conduction band edge. At room temperature, an electron barrier height (conduction band offset) of 2.8 eV was measured using the standard Fowler-Nordheim tunneling model. The electron conduction through the SiO2 insulating layer was evaluated by studying the experimental temperature dependence of the gate current. In particular, the Fowler-Nordheim electron barrier height showed a negative temperature coefficient (dφB/dT = - 0.98 meV/°C), which is very close to the expected value for an ideal SiO2/4H-SiC system. This result, obtained for deposited SiO2 layers, is an improvement compared to the values of the temperature coefficient of the Fowler-Nordheim electron barrier height reported for thermally grown SiO2. In fact, the smaller dependence of φB on the temperature observed in this work represents a clear advantage of our deposited SiO2 for the operation of MOSFET devices at high temperatures.



Edited by:

Robert Stahlbush, Philip Neudeck, Anup Bhalla, Robert P. Devaty, Michael Dudley and Aivars Lelis




P. Fiorenza et al., "Temperature-Dependence Study of the Gate Current SiO2/4H-SiC MOS Capacitors", Materials Science Forum, Vol. 924, pp. 473-476, 2018

Online since:

June 2018




* - Corresponding Author

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