Automated Mapping of Micropipes in SiC Wafers Using Polarized-Light Microscope
We have developed a process that is able to detect, count, and map micropipes on SiC substrates. This process uses a polarized light microscope to scan the wafer. The pictures taken are analyzed with a program that produces a micropipe map as well as numerical defect distribution data in a text file. The results of the process were validated with x-ray topography measurement. The repeatability of this process is also studied and reported.
Robert Stahlbush, Philip Neudeck, Anup Bhalla, Robert P. Devaty, Michael Dudley and Aivars Lelis
S. McGuire et al., "Automated Mapping of Micropipes in SiC Wafers Using Polarized-Light Microscope", Materials Science Forum, Vol. 924, pp. 527-530, 2018