Automated Mapping of Micropipes in SiC Wafers Using Polarized-Light Microscope

Abstract:

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We have developed a process that is able to detect, count, and map micropipes on SiC substrates. This process uses a polarized light microscope to scan the wafer. The pictures taken are analyzed with a program that produces a micropipe map as well as numerical defect distribution data in a text file. The results of the process were validated with x-ray topography measurement. The repeatability of this process is also studied and reported.

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Periodical:

Edited by:

Robert Stahlbush, Philip Neudeck, Anup Bhalla, Robert P. Devaty, Michael Dudley and Aivars Lelis

Pages:

527-530

Citation:

S. McGuire et al., "Automated Mapping of Micropipes in SiC Wafers Using Polarized-Light Microscope", Materials Science Forum, Vol. 924, pp. 527-530, 2018

Online since:

June 2018

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$38.00

* - Corresponding Author

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