Determination of Effective Diffusion Coefficient of Copper in Silicon by Diffusion from Bulk into the Polysilicon Backside

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Periodical:

Solid State Phenomena (Volumes 108-109)

Edited by:

B. Pichaud, A. Claverie, D. Alquier, H. Richter and M. Kittler

Pages:

385-394

DOI:

10.4028/www.scientific.net/SSP.108-109.385

Citation:

M. B. Shabani et al., "Determination of Effective Diffusion Coefficient of Copper in Silicon by Diffusion from Bulk into the Polysilicon Backside", Solid State Phenomena, Vols. 108-109, pp. 385-394, 2005

Online since:

December 2005

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$35.00

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