Strained Silicon on Ultrathin Silicon-Germanium Virtual Substrates
Molecular beam epitaxy is employed for the growth of strained-Si layers on top of virtual substrates with highly-relaxed ultrathin SiGe buffers in a continuous procedure. An initial growth stage at a temperature-ramp down to below 200°C causes misfit-dislocation generation by nucleation from point defects and provides an early relaxation in the SiGe buffers. In situ monitoring is used for the growth control. Layer thicknesses and composition are proved by ex situ spectroscopic ellipsometry. %Raman investigations on the layer stacks reveal high degrees of relaxation (70-100%) in sub-100nm SiGe buffer layers containing from 12 to 42 % Ge. Stress in strained Si layers estimated by means of Raman-spectra shift is adjustable from 0.92 to 6.84 GPa by the Ge-content in virtual substrates. Surface morphology of strained Si and of relaxed SiGe buffers is smooth and crosshatch-free. Device test structures show substantial increase of carrier mobilities in nMOSFETs fabricated on these strained-Si layers.
B. Pichaud, A. Claverie, D. Alquier, H. Richter and M. Kittler
K. Lyutovich et al., "Strained Silicon on Ultrathin Silicon-Germanium Virtual Substrates", Solid State Phenomena, Vols. 108-109, pp. 463-468, 2005