The paper deals with mechatronic devices for accuracy improvement of measuring and metal cutting machines, robots, etc. The mechatronic means for correction of systematic errors of information-measuring systems including linear and rotary encoders and final 3-D position correction of a cutting instrument or touch probe are presented. The technical solutions are given with the application of active materials for smart probes and piezoactuators. A case for the application of piezoactive raster plates and other elements is described together with volumetric control diagrams and examples of practical implementation. Error correction problems can be solved using the piezoactive, piezoelectric or piezomagnetic substrate in the measuring or the datum system of the machines. An implementation of piezoelectrical correctional devices is very efficient for precise engineering where cutting or measuring forces are negligible and displacement values are in the range of several micrometers.