Application of Aerodynamic Lenses to In Situ Particle Monitors (ISPM) for Higher Reliability in Semiconductor Fabrication Process

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Periodical:

Solid State Phenomena (Volume 120)

Edited by:

Young-Jin Kim

Pages:

273-278

DOI:

10.4028/www.scientific.net/SSP.120.273

Citation:

T. Kim and S. K. Chae, "Application of Aerodynamic Lenses to In Situ Particle Monitors (ISPM) for Higher Reliability in Semiconductor Fabrication Process", Solid State Phenomena, Vol. 120, pp. 273-278, 2007

Online since:

February 2007

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$35.00

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