Design of a Micropositioning Table for Active Grinding Control
In order to realize active grinding control, a nanometer micropositioning table is designed. The table has a circular working area with diameter of 150 mm. Three piezoelectric actuators are utilized in parallel to drive the moving part with flexure guide mechanism. Through cooperation of the three piezoelectric actuators, the moving part can implement 3-DOF nanometer positioning. The flexure hinge mechanism can also provide preload for the actuators. The preload can keep the moving part from separation with the piezoelectric actuators during moving process. The dynamic model of the micropositioning table is developed with consideration of the driving circuit. To improve the dynamic performance of the micropositioning table, a decoupling PID controller is designed by use of frequency domain approach. The experimental tests have been carried out to verify the performance of the micropositioning table and the established decoupling controller.
Chunli BAI, Sishen XIE, Xing ZHU
Y. L. Tian et al., "Design of a Micropositioning Table for Active Grinding Control", Solid State Phenomena, Vols. 121-123, pp. 603-606, 2007