Six-DOF Nanomanipulation Tools for Nanoscale Device Prototyping and Fabrication
With the progress of instrumentation in nanoscale visualization, tremendous sicentific dicoveries and understanding has been made. A great breakthrough in nanotechnology came with the inventions of scanning tunneling microscope in 1982 and atomic force microscope in 1986. These revolutionary inventions opened the nanoworld to scientists and engineers by visualizing it with atomic resolution. However, the lack of efficient nanomanipulation capability has become a bottleneck for creating devices using nanocomponents both in the research community and industry. This paper presents the stateof- the-art of nanomanipulation concepts, manipulator designs, manipulator systems. Such an approach has certain advantages over existing designs which have such limitations as device sizes orders of magnitude too large for in situ applications and further device miniaturization restricted due to the adverse effect of physical scaling laws.
Chunli BAI, Sishen XIE, Xing ZHU
Z. Q. Zhu and H. L. Cui, "Six-DOF Nanomanipulation Tools for Nanoscale Device Prototyping and Fabrication", Solid State Phenomena, Vols. 121-123, pp. 823-828, 2007