Effect of Nanoscale Multilayered Structurization on Hardness and Wear Resistance in Al-Cr-N Coating

Abstract:

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Al-Cr-N coatings were deposited on Si substrate by unbalanced magnetron (UBM) sputtering with Al and Cr targets and Ar and N2 reactive gases at substrate bias of -50V. At a fixed chamber pressure of 0.8 Pa, the microstructure of the coatings was changed from AlN/CrN nanoscale multilayered structure to (Al,Cr)N mixed single layered one with the increase of rotation speed of substrate holder. The residual compressive stress of AlN/CrN nanoscale multilayered coating was higher than that of (Al,Cr)N single layered coating. For the AlN/CrN nanoscale multilayered coating, the residual compressive stress was reduced with increase in total pressure of reactive gases. The AlN/CrN nanoscale multilayered coatings with higher residual compressive stress showed higher hardness and wear resistance.

Info:

Periodical:

Solid State Phenomena (Volumes 124-126)

Edited by:

Byung Tae Ahn, Hyeongtag Jeon, Bo Young Hur, Kibae Kim and Jong Wan Park

Pages:

1305-1308

DOI:

10.4028/www.scientific.net/SSP.124-126.1305

Citation:

J. K. Park et al., "Effect of Nanoscale Multilayered Structurization on Hardness and Wear Resistance in Al-Cr-N Coating", Solid State Phenomena, Vols. 124-126, pp. 1305-1308, 2007

Online since:

June 2007

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Price:

$35.00

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