Effect of Nanoscale Multilayered Structurization on Hardness and Wear Resistance in Al-Cr-N Coating
Al-Cr-N coatings were deposited on Si substrate by unbalanced magnetron (UBM) sputtering with Al and Cr targets and Ar and N2 reactive gases at substrate bias of -50V. At a fixed chamber pressure of 0.8 Pa, the microstructure of the coatings was changed from AlN/CrN nanoscale multilayered structure to (Al,Cr)N mixed single layered one with the increase of rotation speed of substrate holder. The residual compressive stress of AlN/CrN nanoscale multilayered coating was higher than that of (Al,Cr)N single layered coating. For the AlN/CrN nanoscale multilayered coating, the residual compressive stress was reduced with increase in total pressure of reactive gases. The AlN/CrN nanoscale multilayered coatings with higher residual compressive stress showed higher hardness and wear resistance.
Byung Tae Ahn, Hyeongtag Jeon, Bo Young Hur, Kibae Kim and Jong Wan Park
J. K. Park et al., "Effect of Nanoscale Multilayered Structurization on Hardness and Wear Resistance in Al-Cr-N Coating", Solid State Phenomena, Vols. 124-126, pp. 1305-1308, 2007