The Effect of Substrate Temperature on the Formation of ITO Thin Films

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Indium tin oxide (ITO) used in many applications such as electronic and optical devices were deposited on the soda lime glass substrate by an electron beam evaporation techniques from a mixture of 90wt% of In2O3 and 10wt% of SnO2. The physical, electrical and optical properties of the ITO films were determined as a function of substrate temperature. The films deposited at 200 showed optimum properties with a strong diffraction peak having a preferred orientation along the [111] direction. Experimental results showed that sheet resistance and transmittance of the ITO film increased with an increase in substrate temperature. Surface roughness increased slightly as a function of substrate temperature because of grain growth.

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Periodical:

Solid State Phenomena (Volumes 124-126)

Edited by:

Byung Tae Ahn, Hyeongtag Jeon, Bo Young Hur, Kibae Kim and Jong Wan Park

Pages:

195-198

DOI:

10.4028/www.scientific.net/SSP.124-126.195

Citation:

B. R. Cho "The Effect of Substrate Temperature on the Formation of ITO Thin Films", Solid State Phenomena, Vols. 124-126, pp. 195-198, 2007

Online since:

June 2007

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$35.00

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