Indium tin oxide (ITO) used in many applications such as electronic and optical devices were deposited on the soda lime glass substrate by an electron beam evaporation techniques from a mixture of 90wt% of In2O3 and 10wt% of SnO2. The physical, electrical and optical properties of the ITO films were determined as a function of substrate temperature. The films deposited at 200 showed optimum properties with a strong diffraction peak having a preferred orientation along the  direction. Experimental results showed that sheet resistance and transmittance of the ITO film increased with an increase in substrate temperature. Surface roughness increased slightly as a function of substrate temperature because of grain growth.