New Brush Scrubbing Techniques for a Wafer Bevel, Apex and Edge

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Periodical:

Solid State Phenomena (Volume 134)

Edited by:

Paul Mertens, Marc Meuris and Marc Heyns

Pages:

205-208

DOI:

10.4028/www.scientific.net/SSP.134.205

Citation:

H. Ugajin et al., "New Brush Scrubbing Techniques for a Wafer Bevel, Apex and Edge", Solid State Phenomena, Vol. 134, pp. 205-208, 2008

Online since:

November 2007

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$35.00

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