A Wet Etching Technique to Reveal Threading Dislocations in Thin Germanium Layers

Abstract:

Article Preview

Info:

Periodical:

Solid State Phenomena (Volume 134)

Edited by:

Paul Mertens, Marc Meuris and Marc Heyns

Pages:

83-86

DOI:

10.4028/www.scientific.net/SSP.134.83

Citation:

L. Souriau et al., "A Wet Etching Technique to Reveal Threading Dislocations in Thin Germanium Layers", Solid State Phenomena, Vol. 134, pp. 83-86, 2008

Online since:

November 2007

Export:

Price:

$35.00

In order to see related information, you need to Login.

In order to see related information, you need to Login.