Molybdenum Contamination in Silicon: Detection and Impact on Device Performances
In this paper, a case of molybdenum contamination from wet cleaning is discussed, and various techniques are compared for their ability to detect molybdenum. In addition, the impact of this sort of contamination on the electrical results of a bipolar device is studied.
Paul Mertens, Marc Meuris and Marc Heyns
D. Codegoni et al., "Molybdenum Contamination in Silicon: Detection and Impact on Device Performances", Solid State Phenomena, Vols. 145-146, pp. 123-126, 2009