Molybdenum Contamination in Silicon: Detection and Impact on Device Performances

Abstract:

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In this paper, a case of molybdenum contamination from wet cleaning is discussed, and various techniques are compared for their ability to detect molybdenum. In addition, the impact of this sort of contamination on the electrical results of a bipolar device is studied.

Info:

Periodical:

Solid State Phenomena (Volumes 145-146)

Edited by:

Paul Mertens, Marc Meuris and Marc Heyns

Pages:

123-126

DOI:

10.4028/www.scientific.net/SSP.145-146.123

Citation:

D. Codegoni et al., "Molybdenum Contamination in Silicon: Detection and Impact on Device Performances", Solid State Phenomena, Vols. 145-146, pp. 123-126, 2009

Online since:

January 2009

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Price:

$35.00

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