Application of Diamond and Related Materials

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Authors: Guang Hui Li, Peng Wu, Xiao Long Ni, Wen Fang Peng, Guang Yu Tan
Abstract: A control method for 100 nm scale motion platform driven by linear servo motors is investigated using a PMAC controller. The control of speed and acceleration is improved by adjusting the PMAC parameters. High-quality speed and acceleration characteristics is obtained, which provides a basis and reference for the application of the platform to high-speed and high-precision feed system.

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