Microdefects in Heavily Phosphorus-Doped Czochralski Silicon

Abstract:

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Oxygen precipitation (OP) and annihilation of voids in heavily phosphorus (P)-doped Czochralski (Cz) silicon have been investigated. It was found that the nucleation anneal at 650°C resulted in much more pronounced OP in the subsequent high temperature anneal than that at 800 or 900 °C. This was due to that SiP precipitates could be formed in heavily P-doped Cz silicon by the 650oC anneal and they acted as the heterogeneous nuclei for OP in the following anneal at high temperatures. The rapid thermal anneal (RTA) at 1200°C was proved to be an effective means to annihilate voids. Moreover, it was found that the significant OP resulting from the two-step anneal of 650°C/8 h + 1000°C/16 h could also cause the substantial annihilation of voids in heavily P-doped Cz silicon. The mechanisms for the annihilation of voids have been tentatively discussed.

Info:

Periodical:

Solid State Phenomena (Volumes 178-179)

Edited by:

W. Jantsch and F. Schäffler

Pages:

201-204

DOI:

10.4028/www.scientific.net/SSP.178-179.201

Citation:

Z. H. Wang et al., "Microdefects in Heavily Phosphorus-Doped Czochralski Silicon", Solid State Phenomena, Vols. 178-179, pp. 201-204, 2011

Online since:

August 2011

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Price:

$35.00

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