Particle Measurement with a Liquid-Borne Particle Counter: Analytical Figures of Merit

Abstract:

Article Preview

Particle contamination is one of the major concerns in semiconductor industry as it can reduce device yield, device quality and device reliability [1]. Liquid-borne particle counters (particle counters) are widely used to measure particle levels in water, chemicals, and other process liquids. In conjunction with sonication in ultrapure water and/or other liquids, these counters are also used to measure particle levels on surfaces of wafers and/or chamber parts to determine the cleanliness of wafer/part surface and to evaluate and improve surface cleaning processes. They have become indispensable tools in semiconductor surface cleaning processes [2].

Info:

Periodical:

Solid State Phenomena (Volume 219)

Edited by:

Paul Mertens, Marc Meuris and Marc Heyns

Pages:

157-160

Citation:

S. Liu and B. Liu, "Particle Measurement with a Liquid-Borne Particle Counter: Analytical Figures of Merit", Solid State Phenomena, Vol. 219, pp. 157-160, 2015

Online since:

September 2014

Authors:

Export:

Price:

$38.00

* - Corresponding Author

[1] T. Hattori (Ed. ), Ultraclean Surface Processing of Silicon Wafers (Springer-Verlag, Berlin Heidelberg. 1998).

[2] R. P. Donovan (Ed. ), Particle Control for Semiconductor Manufacturing (Marcel Dekker, Inc., New York, 1990).

[3] ISO 21501-2: 2007(E). Determination of particle size distribution – Single particle light interaction methods – Part 2: Light scattering liquid-borne particle counter (2007).

DOI: https://doi.org/10.3403/30137696

[4] M. E. Swartz, I. S. Krull, Handbook of Analytical Validation (CRC Press, New York, 2012).

[5] Automotive Industry Action Group, Measurement Systems Analysis; Reference Manual (4th ed. ). (Automotive Industry Action Group, Detroit, 2010).

[6] Donald J. Wheeler, EMP III: Evaluating the Measurement Process & Using Imperfect Data (SPC Press, Tennessee, 2006).