Paper Title:
Particle Measurement with a Liquid-Borne Particle Counter: Analytical Figures of Merit
  Abstract

Particle contamination is one of the major concerns in semiconductor industry as it can reduce device yield, device quality and device reliability [1]. Liquid-borne particle counters (particle counters) are widely used to measure particle levels in water, chemicals, and other process liquids. In conjunction with sonication in ultrapure water and/or other liquids, these counters are also used to measure particle levels on surfaces of wafers and/or chamber parts to determine the cleanliness of wafer/part surface and to evaluate and improve surface cleaning processes. They have become indispensable tools in semiconductor surface cleaning processes [2].

  Info
Periodical
Solid State Phenomena (Volume 219)
Chapter
Chapter 5: Fluid Dynamics, Cleaning Mechanics
Edited by
Paul Mertens, Marc Meuris and Marc Heyns
Pages
157-160
DOI
10.4028/www.scientific.net/SSP.219.157
Citation
S. Liu, B. Liu, "Particle Measurement with a Liquid-Borne Particle Counter: Analytical Figures of Merit", Solid State Phenomena, Vol. 219, pp. 157-160, 2015
Online since
September 2014
Authors
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Price
$35.00
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