Particle Measurement with a Liquid-Borne Particle Counter: Analytical Figures of Merit
Particle contamination is one of the major concerns in semiconductor industry as it can reduce device yield, device quality and device reliability . Liquid-borne particle counters (particle counters) are widely used to measure particle levels in water, chemicals, and other process liquids. In conjunction with sonication in ultrapure water and/or other liquids, these counters are also used to measure particle levels on surfaces of wafers and/or chamber parts to determine the cleanliness of wafer/part surface and to evaluate and improve surface cleaning processes. They have become indispensable tools in semiconductor surface cleaning processes .
Paul Mertens, Marc Meuris and Marc Heyns
S. Liu, B. Liu, "Particle Measurement with a Liquid-Borne Particle Counter: Analytical Figures of Merit", Solid State Phenomena, Vol. 219, pp. 157-160, 2015