Ultra Clean Processing of Semiconductor Surfaces XIV

Ultra Clean Processing of Semiconductor Surfaces XIV

Description:

The 14th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (14th UCPSS 2018, Leuven, Belgium, September 3-5, 2018) was organized by IMEC and the scope of this symposium includes all issues related to contamination, cleaning and surface preparation in mainstream large-scale Integrated Circuit manufacturing. This collection will be interesting and useful for experts in the field of microelectronics.

Keywords:
Contamination, Etching, Interconnects, Microelectronics, Particle Removal, Pattern Collapse, Semiconductors, Surface Cleaning, Surface Functionalization, Wetting Drying

Ringgold Subjects:

Materials Science

Info:

ISBN-13:
978-3-0357-1417-3
Editors:
Paul Mertens, Marc Meuris and Marc Heyns
Pages:
356
Year:
2018
Edition:
softcover

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