Effect of Si Surface Roughness on the Current-Voltage Characteristics of Ultra-Thin Gate Oxides

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Periodical:

Solid State Phenomena (Volumes 65-66)

Edited by:

Marc Heyns, Marc Meuris and Paul Mertens

Pages:

249-252

DOI:

10.4028/www.scientific.net/SSP.65-66.249

Citation:

M. Houssa et al., "Effect of Si Surface Roughness on the Current-Voltage Characteristics of Ultra-Thin Gate Oxides", Solid State Phenomena, Vols. 65-66, pp. 249-252, 1999

Online since:

November 1998

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$35.00

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