Post Dry-Etch Cleaning Issues of an Organic Low-K Dielectric

Abstract:

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Periodical:

Solid State Phenomena (Volumes 65-66)

Edited by:

Marc Heyns, Marc Meuris and Paul Mertens

Pages:

89-92

DOI:

10.4028/www.scientific.net/SSP.65-66.89

Citation:

F. Lanckmans et al., "Post Dry-Etch Cleaning Issues of an Organic Low-K Dielectric", Solid State Phenomena, Vols. 65-66, pp. 89-92, 1999

Online since:

November 1998

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Price:

$35.00

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