Marc Heyns, Marc Meuris and Paul Mertens
Abstract: Current work describes development, testing and verification of a single wafer megasonic cleaning method utilizing a transducer design that...
Abstract: With scaling of ULSI devices, the process temperatures are continuously lowered. The oxide films, which were deposited at low temperature,...
Abstract: The cumulative installed solar power generation has been rising exponentially over the past decade. This has lead to a concomitant rise in...
This paper has been added to your cart ($35.00)
You may also Subscribe for unlimited downloads of all papers and abstracts on www.scientific.net ($135.00 per month)
Scientific.Net is a registered brand of Trans Tech Publications Inc
© 2017 by Trans Tech Publications Inc. All Rights Reserved