The Ozone Solubility and its Decay in Aqueous Solutions: Crucial Issues in Ozonated Chemistries for Semiconductor Cleaning

Abstract:

Article Preview

Info:

Periodical:

Solid State Phenomena (Volumes 76-77)

Edited by:

Marc Heyns, Marc Meuris and Paul Mertens

Pages:

211-214

DOI:

10.4028/www.scientific.net/SSP.76-77.211

Citation:

F. De Smedt et al., "The Ozone Solubility and its Decay in Aqueous Solutions: Crucial Issues in Ozonated Chemistries for Semiconductor Cleaning", Solid State Phenomena, Vols. 76-77, pp. 211-214, 2001

Online since:

January 2001

Export:

Price:

$35.00

In order to see related information, you need to Login.