Optimisations of SC-1 Conditions for Sub 0.18μm Technologies in an Industrial Environment

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Periodical:

Solid State Phenomena (Volumes 76-77)

Edited by:

Marc Heyns, Marc Meuris and Paul Mertens

Pages:

93-96

DOI:

10.4028/www.scientific.net/SSP.76-77.93

Citation:

S. Petitdidier et al., "Optimisations of SC-1 Conditions for Sub 0.18μm Technologies in an Industrial Environment", Solid State Phenomena, Vols. 76-77, pp. 93-96, 2001

Online since:

January 2001

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$35.00

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