Strain Characterisation at the nm Scale of Deep Sub-Micron Devices by Convergent-Beam Electron Diffraction

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Periodical:

Solid State Phenomena (Volumes 82-84)

Edited by:

V. Raineri, F. Priolo, M. Kittler and H. Richter

Pages:

727-734

DOI:

10.4028/www.scientific.net/SSP.82-84.727

Citation:

A. Armigliato et al., "Strain Characterisation at the nm Scale of Deep Sub-Micron Devices by Convergent-Beam Electron Diffraction", Solid State Phenomena, Vols. 82-84, pp. 727-734, 2002

Online since:

November 2001

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