Relation between Particle Density and Haze on a Wafer: a New Approach to Measuring Nano-Sized Particles

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Periodical:

Solid State Phenomena (Volume 92)

Edited by:

Marc Heyns, Paul Mertens and Marc Meuris

Pages:

161-164

DOI:

10.4028/www.scientific.net/SSP.92.161

Citation:

K. D. Xu et al., "Relation between Particle Density and Haze on a Wafer: a New Approach to Measuring Nano-Sized Particles", Solid State Phenomena, Vol. 92, pp. 161-164, 2003

Online since:

May 2003

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