Microcrystalline Silicon Thin-Films Grown by Plasma Enhanced Chemical Vapour Deposition - Growth Mechanisms and Grain Size Control

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Periodical:

Solid State Phenomena (Volume 93)

Edited by:

T. Fuyuki, T. Sameshima, H.P. Strunk and J.H. Werner

Pages:

257-268

DOI:

10.4028/www.scientific.net/SSP.93.257

Citation:

P. Roca i Cabarrocas et al., "Microcrystalline Silicon Thin-Films Grown by Plasma Enhanced Chemical Vapour Deposition - Growth Mechanisms and Grain Size Control", Solid State Phenomena, Vol. 93, pp. 257-268, 2003

Online since:

June 2003

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$35.00

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