Precise Measurement of Ge Depth Profiles in SiGe HBT's - a Comparison of Different Methods

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Periodical:

Solid State Phenomena (Volumes 95-96)

Edited by:

H. Richter and M. Kittler

Pages:

473-482

DOI:

10.4028/www.scientific.net/SSP.95-96.473

Citation:

P. Zaumseil et al., "Precise Measurement of Ge Depth Profiles in SiGe HBT's - a Comparison of Different Methods", Solid State Phenomena, Vols. 95-96, pp. 473-482, 2004

Online since:

September 2003

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