Considering optimization of the technology and production of Solar Cells an overall goal is to lower the production costs per Watt through optimization of the parameters of Solar Cell. The dominant material up to now for the majority of commercially produced solar cells is crystalline silicon (c-Si). A lot of efforts has been undertaken to increase the electrical efficiency of Si based solar cells above 20% [3-5]. Unfortunately, efficiency improvements are often reached only with the help of costly process steps and as result without possibility to use such improvements in industrial products. One of the trends in achieving higher efficiency in monocristalline Si based Solar Cells is introduction of complicated spatial structure on absorbing surface of SC. Reports indicates expectations of efficiencies as high as 24% in laboratory samples but with significant raise in costs for Spatial SC production (Fig. 1). It is clear that optimization of technological steps and parameters must be considered thinking about introduction of Spatial SC. Optimization in the case of Spatial SC must be provided by two steps: first of all we need to evaluate impact of spatial structure to physical properties of the SSC and in the next step evaluate technological possibilities for production of the SSC with optimized physical characteristics.