Basic Self-Formation Processes in the Technologies of the Integrated Circuits
The analysis for basic processes of self-formation microstructure in technologies of manufacturing semiconductor devices and integrated circuits (IC) have been made and the requirements have been formulated. The results of the implementation of self-formation processes for creating new technologies of manufacturing semiconductor devices and IC have been presented.
R. Navickas and R. Kirvaitis, "Basic Self-Formation Processes in the Technologies of the Integrated Circuits", Solid State Phenomena, Vols. 97-98, pp. 229-234, 2004