Microstructural Characterisation of RF Magnetron Sputtered ZnO Thin Films on SiC

Abstract:

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The microstructural characterization of r.f. magnetron sputtered ZnO thin films deposited on 6H-SiC is presented with a comprehensive investigation of their properties as a function of annealing temperature and film thickness. These structures, with some modifications, are utilised as Schottky diode hydrogen gas sensors and Surface Acoustic Wave (SAW) devices.

Info:

Periodical:

Solid State Phenomena (Volumes 99-100)

Edited by:

Witold Lojkowski and John R. Blizzard

Pages:

123-126

DOI:

10.4028/www.scientific.net/SSP.99-100.123

Citation:

A. Trinchi et al., "Microstructural Characterisation of RF Magnetron Sputtered ZnO Thin Films on SiC", Solid State Phenomena, Vols. 99-100, pp. 123-126, 2004

Online since:

July 2004

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Price:

$35.00

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