Microstructural Characterisation of RF Magnetron Sputtered ZnO Thin Films on SiC
The microstructural characterization of r.f. magnetron sputtered ZnO thin films deposited on 6H-SiC is presented with a comprehensive investigation of their properties as a function of annealing temperature and film thickness. These structures, with some modifications, are utilised as Schottky diode hydrogen gas sensors and Surface Acoustic Wave (SAW) devices.
Witold Lojkowski and John R. Blizzard
A. Trinchi et al., "Microstructural Characterisation of RF Magnetron Sputtered ZnO Thin Films on SiC", Solid State Phenomena, Vols. 99-100, pp. 123-126, 2004