Papers by Author: C.L. Chu

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Authors: C.L. Chu, C.Y. Chung, C.M. Tseng, Y.C. Lin, C.F. Li, K.M. Yeh
Abstract: This paper presents an autofocusing system for an optical microscope (OM) based on a low-cost, highly-sensitive laser focusing probe integrated with a precision stepper positioning stage. During the OM measurement procedure, the laser focusing probe detects variations in the distance between the glass substrate containing the specimen of interest and the OM objective lens and generates a driving signal to adjust the position of the OM via the precision positioning stage such that a precisely-focused image is obtained. The experimental results show that the integrated laser focusing probe and positioning stage complete the autofocusing process within 0.5 seconds.
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