Papers by Author: G.E. Yalovega

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Authors: Tatiana Myasoedova, G.E. Yalovega, V.V. Petrov, O.V. Zabluda, V.A. Shmatko, A.O. Funik
Abstract: SiOxCuOy thin films were prepared by the deposition on to the Si/SiO2 substrates from the alcoholic solutions employing the sol-gel technique. The various analytic techniques were applied to characterize structure and properties of the films under study . The both X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS) studies showed the presence CuO as well as CuO2 phases and formation of a dual-oxide CuSiO3 with the average crystallites sizes of 35-50 nm. The conductance of the films was rather sensitive to the presence of 1-20 ppm NO2 concentration at the operating temperatures in the range of 20–200 C.
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