Papers by Author: K.T. Yang

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Authors: Shuo Jen Lee, J.J. Lai, Yu Ming Lee, Chi Yuan Lee, K.T. Yang, C.W. Peng
Abstract: In this study, the parametric effects of the EMM process were studied by both numerical simulation and experimental tests. The numerical simulation was performed using commercial software, FEMLAB, to establish a multi-physics model which consists of electrical field, convection and diffusion phenomena to simulate the parametric effects of pulse rate, pulse duty, electrode gap and inflow velocity. From the simulated results, the relationship between parameters and the distribution of metal removal could be established. Proper process variables were also chosen to conduct the EMM experiments. After the experiments, the profile of the processed rectangular slot was measured by a Keyence digital microscope. Comparing profile of the processed rectangular slot with the profile of the cathode, the machining accuracy of EMM process could be determined. It could also verify the goodness of the multi-physics model for predicting machining accuracy. From this study, the effects of parameters such as pulse rate, pulse duty, electrode gap and inflow velocity are better understood. The simulation model could be employed as a predictive tool to provide optimal parameters for better machining accuracy and process stability of the EMM process.
290
Authors: Shuo Jen Lee, J.J. Lai, Yu Ming Lee, Chi Yuan Lee, K.T. Yang, C.W. Peng
Abstract: In this study, the parametric effects of the EMM process were studied by both numerical simulation and experimental tests. The numerical simulation was performed using commercial software, FEMLAB, to establish a multi-physics model which consists of electrical field, convection and diffusion phenomena to simulate the parametric effects of pulse rate, pulse duty, electrode gap and inflow velocity. From the simulated results, the relationship between parameters and the distribution of metal removal could be established. Proper process variables were also chosen to conduct the EMM experiments. After the experiments, the profile of the processed rectangular slot was measured by a Keyence digital microscope. Comparing profile of the processed rectangular slot with the profile of the cathode, the machining accuracy of EMM process could be determined. It could also verify the efficacy of the multi-physics model for predicting machining accuracy. From this study, the effects of parameters such as pulse rate, pulse duty, electrode gap and inflow velocity are better understood. The simulation model could be employed as a predictive tool to provide optimal parameters for better machining accuracy and process stability of the EMM process.
891
Authors: Shuo Jen Lee, Yu Ming Lee, Chi Yuan Lee, J.J. Lai, K.T. Yang, F.H. Kuan
Abstract: Due to lack of desirable mechanical properties of silicon substrate; the current trend of micro-fabrication technology is towards metallic materials. In this study, the electrochemical micromachining (EMM) technology is developed to fabricate micro-scale flow channels on thin metallic 316L stainless steel plate. The cathode electrode, the tool, is the mirror image of flow channels. It was produced by the MEMS and UV-LIGA technology and the size is 200μm in width and 500μm in height for the intension to fabricate a serpentine flow channel of 200μm in both depth and width. Because of the electrode size, the process control parameters and geometrical features surpassed conventional and CMOS methods. The flow channels on 0.6mm thick SS 316L plates were fabricated by EMM process within 30 seconds with effective area of 625mm2. The dimensions of flow channel were varying from 1504m to 5004m in width and about 2004m in depth. The results demonstrate the EMM technology produces good quality metallic flow channels efficiently.
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