Papers by Author: S. Kiyono

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Authors: Hideki Shimizu, S. Kiyono, Wei Gao, H. Shoji
Abstract: For effective medical treatment, sensors that can find foreign bodies such as tumors in early stage are required. This paper describes a new sensor for foreign body detection utilizing the fact that the property hardness of foreign bodies differs from that of normal tissues. It consists of a balloon probe, which is constructed with a thin rubber membrane inflated with compressed air, and an optical deformation analyzing system. Experiments are carried out using samples in which single hard balls are embedded to model single tumor in soft tissue. It was confirmed that this sensor can detect the existence of the hard ball and can also distinguish the inequality of size and hardness of the ball. Furthermore, experimental results detecting multi-objects showed that this sensor has the ability to detect the existence of multi objects and their relative positions simultaneously. By measuring the consistence of the arm and the abdomen of human body, it is proved that the sensor is also suitable for consistence measurement of human anatomy.
Authors: J. Aoki, Wei Gao, S. Kiyono, T. Ono
Abstract: This paper presents a high precision AFM for nanometrology of large area micro-structured surfaces. A PZT with a stroke of 100 microns is used as the Z-directional actuator for the AFM cantilever. Two capacitance-type displacement probes are aligned at two sides of the PZT along the movement direction. The displacement as well as the tilt motion of the PZT can be accurately measured and compensated for based on the probe outputs. It was confirmed that the tilt motion of the PZT was approximately 32 arcseconds over the 100 micron stroke. The sample is moved by two linear stages for scanning in the X- and Y-directions over an area of 50 mm x 40 mm. The angular error motions of the stages that influence the AFM accuracy are measured by an autocollimator for compensation. A piezo-resistive cantilever, which can output the atomic force signal by itself, was employed instead of the conventional optical force sensing device for compactness of the AFM structure. A large area sinusoidal metrology surface has been successfully measured by the developed high-precision AFM.
Authors: Wei Gao, J. Yokoyama, S. Kiyono, N. Hitomi
Abstract: This paper describes a scanning multi-probe measurement system for local alignment of linac components. The system consists of two probe-units, each having three displacement probes. The two probe-units, which are placed on the two sides of the cylindrical linac components, are moved by a scanning stage with a scanning range of 5 m to simultaneously scan the two opposed straightness profiles of the linac cylinders. A differential output calculated from the probe outputs in each probe-unit cancels the influence of error motions of the scanning stage, and a double ntegration of the differential output gives the straightness profile. The difference between the unknown zero-values of the probes in each probe-unit of zero-difference, which introduces a parabolic error term in the profile evaluation result, is calculated and compensated for by a zero-adjustment method so that accurate straightness profiles of the linac cylinders can be obtained. The effectiveness of the measuring system is confirmed by experimental results.
Authors: Yutaka Watanabe, W. Gao, Hideki Shimizu, S. Kiyono
Authors: Yoshikazu Arai, Wei Gao, S. Kiyono, Tsunemoto Kuriyagawa
Abstract: This paper describes a multi-probe method for measuring the straightness error of a leadscrew-driven stage. Two displacement probes are employed to scan a flat artifact mounted on the stage. The surface profile error of the flat artifact is separated from the straightness error of the stage in a differential output of the probes. The straightness error can thus be obtained accurately from an integration operation of the differential output without the influence of the surface profile error. An improved technique of data processing is adopted for measurement of straightness error components with periodicity shorter than the probe spacing. The influence of the angular error of the stage is compensated for by using the result measured by an autocollimator. Experiments of straightness measurement of a leadscrew-driven stage with a lead of 1 mm were carried out by using two flat artifacts with different degrees of precision. The successful detection of the short-periodicity component of the straightness error with a periodicity equal to the lead indicated the feasibility of the multi-probe method.
Authors: M. Furukawa, Wei Gao, Hideki Shimizu, S. Kiyono, M. Yasutake, K. Takahashi
Abstract: This paper describes a measurement method for three-dimensional (3D) slit width deviations of long precision slot dies, which are essential for process control in manufacturing. A sensor unit consisting of two laser probes with their measurement axes aligned along the same Z-directional line but with opposite measurement directions, is placed between the two parts of the slot die to scan the two opposing surfaces of the parts along the X- and Y-axes. The variation of the sum of the laser probe outputs, which shows the deviation of the distance between the two surfaces, corresponds to the deviation of the slit width in the Z-direction. The 3D slit width deviations can be obtained accurately through scanning the entire surface in the X Y plane. In addition, the surface flatness of the parts can also be measured accurately by adding one more probe. Measurement experiments have been conducted on a precision grinding machine. The measurement results have indicated that the 3D slit width deviations and flatness can be measured with a repeatability error of less than 1 micron, which meets the requirement for quality control of slot dies.
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