Papers by Author: Tetsuya Ohashi

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Authors: Michihiro Sato, Tetsuya Ohashi, Takuya Maruizumi, Isao Kitagawa
Abstract: Representative length scale of ULSI (Ultra Large Scale Integration) cells is going to be at a nano-meter order, and the atomic level defects, such as uneven oxide films or dislocation accumulation are becoming more and more important. Among these defects, dislocation accumulation is known to be caused by thermo-plastic deformation in silicon during the processes of device fabrication. In this study, we analyse such thermal stress, plastic slip deformation and accumulation of dislocations in STI (Shallow Trench Isolation) type ULSI devices when the temperature drops from the initial at 1000 °C to room temperature. For the analysis, we use a crystal plasticity analysis code CLP, assuming that lattice friction stress for the movement of dislocations is proportional to the hardness of silicon, which is known to have strong dependency on temperature. The results show that dislocations are generated between the temperature range from 880 to 800 °C, and its maximum density is highly dependent on the lattice friction stress in the temperature range above 800 °C. For example, the difference of 16 MPa in the lattice friction stress at 1000 °C caused increase in dislocation density more than ten times. It is concluded that control of lattice friction stress at high temperatures is one of the most promising way for the suppression of dislocation accumulation.
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Authors: Yelm Okuyama, Tetsuya Ohashi
Abstract: Plastic deformation and dislocations accumulation in a steel alloy dispersed with vanadium carbide particles is numerically analyzed by a crystal plasticity finite element technique and work hardening characteristics are discussed. Increment of dislocation density that contributes to work hardening is calculated from the mean free path of dislocations. The mean free path is defined by the spacing of forest dislocations and the average spacing of dispersed particles. Obtained yield stress and work hardening characteristics was close to that of experimental result, except that the value of work hardening rate was higher than that of experimental one.
264
Authors: Yohei Yasuda, Tetsuya Ohashi, Takuro Sugiyama
Abstract: Tensile properties of ferrite lamella in pearlite under lattice strain are examined by a strain gradient crystal plasticity analysis. Tensile direction is made to be parallel to the lamella. Obtained results of macroscopic stress-strain relation of the lamella show significant increase of yield stress and strain hardening rate with the reduction of the lamella thickness and further increase of the yield stress with positive normal lattice strain parallel to the tensile direction in the ferrite layer. Whereas normal lattice strain perpendicular to the tensile direction contributes little to the tensile properties.
145
Authors: Michihiro Sato, Tetsuya Ohashi, Takuya Maruizumi, Isao Kitagawa
Abstract: Thermal stress, plastic slip deformation and accumulation of dislocations in shallow trench isolation (STI) type ULSI devices when the temperature drops from 1000 し to room temperature are analyzed by a crystal plasticity analysis cord. The results show that dislocation accumulation takes place at the temperature range over 800 し, and the difference of 6 MPa in the lattice friction stress at 1000 し!causes increase of dislocation density more than 1.6 times. Dislocations generate and accumulate at the shoulder part of the device area and bottom corners of the trench. Dislocations are categorized into two groups. In one group, dislocation lines are mostly straight and parallel to the trench direction, and in the other group, dislocations make half loop type structure. Possibilities for the suppression of dislocation accumulation through control of lattice friction stress at high temperature region are discussed.
1035
Authors: L. Roslan, Tetsuya Ohashi, Yohei Yasuda, Chikara Suruga
Abstract: Elasto-plastic tensile deformations in multi-colony structures are studied by finite element analyses to investigate how the deformation in multi-colony structures influence the strain concentration around colony boundary. The results obtained from plastic strain distributions show that plastic strain concentrates around colony boundary when there is a large difference of deformation between adjacent colonies and around the point where boundaries of differently aligned colonies meet.
33
Authors: Tetsuya Ohashi, Michihiro Sato, Yuhki Shimazu
Abstract: Plastic slip deformations of tricrystals with simplified geometries are numerically analyzed by a FEA-based crystal plasticity code. Accumulation of geometrically necessary (GN) dislocations, distributions of the total slip, plastic work density and GN dislocations on slip systems, as well as some indices for the intensity of slip multiplication are evaluated. Results show that coexistence of GN dislocations on different slip systems is prominent at triple junctions of grain boundaries.
1283
Authors: Roslan Lidyana, Tetsuya Ohashi, Yohei Yasuda, Kohsuke Takahashi, Chikara Suruga
Abstract: Elasto-plastic tensile deformations in pearlite lamellar and two-colony structures are studied by finite element analyses to investigate the effects of lamellar thickness ratio and difference of lamellae orientation of two colonies in pearlite microstructure. The results obtained from plastic strain distributions in lamellar and colony structures show that plastic deformation in cementite lamellar stabilized when ferrite lamellar is thicker than cementite lamellar thickness and plastic strain concentrates when the difference between cementite lamellar orientation in two colonies are larger than 45°.
307
Authors: Ryouji Kondou, Tetsuya Ohashi
Abstract: Slip deformation phenomena in compatible type multi crystal models subjected to tensile load are analyzed by a finite element crystal plasticity analysis code, and accumulation of geometrically-necessary and statistically-stored dislocations (GNDs and SSDs) are evaluated in detail. Crystal orientations for the grains are chosen so that mutual constraint of deformation through grain boundary planes does not take place. We call these models as compatible type multi crystals, because “compatibility requirements” at grain boundaries are automatically maintained by slip deformation only on the primary systems and uniform deformation is expected to occur in each grain. Results of the analysis, however, show non-uniform deformation with high density of GNDs accumulated in a form of band. Growth of such kind of structure of GNDs caused localized accumulation of SSDs at grain boundary triple junctions. Mechanism for the band-shaped accumulation of GNDs in the compatible type multi crystals are discussed from the viewpoint of multi body interactions which arise from shape change of crystal grains after slip deformation.
187
Authors: Tetsuya Ohashi, Ryota Tsugawa, Tomotaka Ogasawara
Abstract: Macroscopic mechanical response of metal polycrystal with mean grain diameter of 0.2 to 5 microns are simulated by a strain gradient crystal plasticity software code which incorporates some phenomenological models for dislocation accumulation and annihilation, as well as dislocation-grain boundary interactions. Obtained results of macroscopic stress-strain relation show significant increase of yield stress and strain hardening ratio for fine grained specimens.
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