Papers by Author: Gyu Hyun Kim

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Authors: Gyu Hyun Kim, Sung Hyuk Cho, Ji Hye Han, Young Bang Lee, Chi Hyeong Roh, Kwon Hong, Sung Ki Park

Abstract: In this paper, we studied stiction behavior of HAR pattern (line and space pattern) dependence on adhesion force with surface tension of...

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Authors: Gyu Hyun Kim, Soon Young Park, Seung Seok Pyo, Ji Hye Han, Jung Nam Kim, Kee Joon Oh, Choon Kun Ryu, Yong Soo Choi, Noh Jung Kwak, Sung Ki Park

Abstract: As a design rule of memory devices is scaled down to sub-100 nm, shallow trench isolation (STI) technology is faced with gap-filling problem...

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Authors: Kang Heon Lee, John Ghekiere, Joon Bum Shim, Eric J. Bergman, Gyu Hyun Kim, Bai Kil Choi, Kee Joon Oh, Geun Min Choi
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Authors: Gyu Hyun Kim, Geun Min Choi, Young Wook Song

Abstract: This study deals with drying induced water marks dependency on the last cleaning methods, substrate conditions, and drying pre-step delaying...

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