Papers by Author: Kenichi Wakisaka

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Authors: Yuki Itoh, Kenichi Wakisaka, Masashi Satoh, Shinzo Yoshikado
Abstract: Thin-film heaters made of molybdenum silicide (MoSi2) were fabricated by RF magnetron sputtering, and the heating characteristics of these heaters in a high vacuum were evaluated. The crystal structure of thin-film was hexagonal contrary to the tetragonal one of the target. MoSi2 thin-film heaters deposited outside an alumina crucible showed almost linear resistance-temperature (R-T ) characteristics. However, resistance decreased due to repeated heatings. The heaters generated almost no contamination in vacuum. The temperature of the crucible reached 1000°C at an electric power of 190 W.
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Authors: Kenichi Wakisaka, Hiroyasu Kado, Shinzo Yoshikado
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Authors: Kenichi Wakisaka, Hiroyasu Kado, Shinzo Yoshikado
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Authors: Yuki Ito, Kenichi Wakisaka, Hiroyasu Kado, Shinzo Yoshikado
Abstract: Thin film heaters made of Ca-doped lanthanum chromite (LaCrO3) are fabricated by means of RF magnetron sputtering. Thin films of Ca-doped LaCrO3 show different heating characteristics under dc current drive for different purities of alumina substrate. In the case of a low purity (95.3%), LaCrO3 thin film heaters showed an increase of resistance with time. On the other hand, in the case of high purity (approximately 99.5%), the resistance was almost constant. It is speculated that impurities such as SiO2 contained in an alumina substrate enhance the migration of Ca atoms through the Pt electrode and increase the resistance because of the decrease of Ca atoms in the thin film. It is considered that the increase of resistance is caused by such a reaction.
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