Papers by Author: Miftakhul Huda

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Authors: Miftakhul Huda, Zulfakri bin Mohamad, Takuya Komori, You Yin, Sumio Hosaka

Abstract: The progress of information technology has increased the demand of the capacity of storage media. Bit patterned media (BPM) has been known...

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Authors: Miftakhul Huda, Takuro Tamura, You Yin, Sumio Hosaka

Abstract: In this work, we studied the fabrication of 12-nm-size nanodot pattern by self-assembly technique using high-etching-selectivity poly...

122
Authors: Takashi Akahane, Miftakhul Huda, You Yin, Sumio Hosaka

Abstract: In this paper, we report two kinds of guide patterns precisely created by electron beam drawing. These guide patterns are expected to...

124
Authors: Takashi Akahane, Miftakhul Huda, Takuro Tamura, You Yin, Sumio Hosaka

Abstract: We have studied functionalization of guide pattern with brush treatment. Especially, the effect of brush treatment on ordering of nanodots...

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Authors: Takashi Akahane, Takuya Komori, Jing Liu, Miftakhul Huda, Zulfakri bin Mohamad, You Yin, Sumio Hosaka

Abstract: In this work, improvement of the observation contrast was investigated by using a carbon film as the hard mask for pattern transfer of block...

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Authors: Miftakhul Huda, You Yin, Sumio Hosaka

Abstract: In this study, we investigate self-assembled large-area nanodot fabrication on a silicon substrate using...

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