Papers by Author: Seung Woo Han

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Authors: Seung Woo Han, Ki Jeong Seo, Jae Jong Lee, Seung Woo Lee, Hak Joo Lee, Jung Yup Kim
Abstract: Nanoimprint lithography is a promising technology to produce sub-100 nm scale features on silicon chips. One of key issues in the nanoimprint lithography is how to make uniform contact between the stamp and the substrate on a large area. In this study a rubber membrane unit under substrate is introduced to resolve this problem. Two layers of membrane were designed to consider air flow in the middle of resist on a silicon wafer. The geometry design for accomplishing uniform contact was carried out using finite element analysis. The material modeling of hyperelastic properties of rubber is characterized by the Mooney-Rivlin strain energy functions. Material constants in the strain energy functions are able to be determined via the curve fitting of experimental stress-strain data. Simple tension and equi-biaxial tests were performed to determine the material constants. To evaluate the effects of a rubber membrane unit, nanoimprint lithography process with it was executed. We could confirm that a distinct improvement of uniform contact was shown and air flow problem was solved during the process.
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Authors: Seung Woo Lee, Seung Woo Han, Jun Yeob Song, Wan Doo Kim, Hwa Ki Lee
Abstract: The reliability, that is long-term quality, requires a different approaching from short-term quality which is used before. As the electronic components are to be easily normalized on the reliability evaluation, many reliability prediction methodologies are used. In this study, integrated reference model of reliability prediction is serviced for existing PRISM and Bellcore which is related on reliability prediction about electronic components, and will service reliability data based on PoF (Physics of Failure) from domestic research center. The constructed frame of reliability evaluation system, which can predict and evaluate reliability of electronic components and MEMS, is designed by using online service of the reliability data accumulated on web. To evaluate proposed system, the reliability evaluation of PCB (Printed Circuits Boards), which is used in NC controller of machine tools, is introduced according to PRISM, the representative reference model of reliability prediction about electronic components based on MIL-HDBK-217F.
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