Papers by Keyword: Ellipsometry

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Authors: Keiko Kouda, Yasuto Hijikata, Hiroyuki Yaguchi, Sadafumi Yoshida

Abstract: We have investigated the oxidation process of SiC (000-1) C-face at low oxygen partial pressures using an in-situ spectroscopic...

813
Authors: Bing Jing Lin, Hong Tao Zhu, A. Kiet Tieu, Gerry Triani

Abstract: An ultra- thin Ti film with a thickness of less than 30 nm was deposited on the surface of a silicon wafer by the filtered arc deposition...

616
Authors: Katja Tonisch, Robert Benzig, Gernot Ecke, Jörg Pezoldt

Abstract: The growth of AlGaN solid solutions on 3C-SiC(111)/Si(111) is demonstrated. The residual stress of the grown layer was investigated by high...

103
Authors: Morten Kildemo, M.B. Mooney, P.V. Kelly, C. Sudre, G.M. Crean
571
Authors: William Chism, Alain C. Diebold, Jesse Canterbury, Curt Richter
177
Authors: L. Asinovsky, S. Fox, E. Karagiannis, M. Schroth, J.J. Sweeney
179
Authors: E. Vogli, Fabian Hoffmann, E. Bartis, G. S. Oehrlein, Wolfgang Tillmann

Abstract: It has been established that hardness and density of diamond-like carbon (DLC) layers can be raised by increasing ion energy during...

2596
Authors: Tohru Hara, Y. Kakizaki, Hisao Tanaka, M. Inoue, K. Kajiyama, T. Yoneda, Kohei Sekine, K. Masao
771
Authors: Seung Jae Moon

Abstract: The thermal conductivity of amorphous silicon (a-Si) thin films is determined by using the non-intrusive, in-situ optical transmission...

689
Showing 1 to 10 of 60 Paper Titles