Papers by Keyword: Lithography

Paper TitlePage

Authors: Q. Humayun, U. Hashim

Abstract: Fabrication techniques for Metal-molecule-metal junction electrodes suitable to study electron tunneling through metal junctions are...

867
Authors: Huan Liu, Wei Guo Liu, Chang Long Cai, Shun Zhou

Abstract: A novel method for fabrication of self-supporting microbridge based on a-si films with tilted support legs for bolometer is studied in this...

1183
Authors: Qing Hua Lin, Jin Yun Zhou, Wen Jing Li

Abstract: For the 1:1 laser projection lithography system used to achieve large-area patterning with higher resolutions as well as higher throughput,...

533
Authors: Vytautas Ostaševičius, Vytautas Bagdonas, Sigitas Tamulevičius, V. Grigaliūnas

Abstract: An electrostatic motor is a very complex dynamical system whose performance critically depends on the shape of the rotor and stator, number...

185
Authors: Jeong Woo Park, Nam Hun Kim

Abstract: Micro/Nanofabrication of silicon substrate based on the atomic force microscope (AFM) followed by wet chemical etching was demonstrated. A...

29
Authors: Bin Miao, Xiao Wei Wei, Dong Min Wu, Jia Dong Li

Abstract: A novel micro spring with steel structures is described here. It can be fit into a specially designed microtensile apparatus, which is...

39
Authors: Zhi Pen Wu, Xing Lin Chen

Abstract: In order to achieve high position precision and synchronization between the wafer stage and the reticle stage, a cross-coupled sliding mode...

2126
Authors: Liang Lei, Xin Liu, Lang Lin Li, Jin Yun Zhou

Abstract: Double fold reduction projection lithography objective lens with bi-telecentric configuration, consists of 6 lenses and the number aperture...

111
Authors: Raphaël Moulart, René Rotinat, Fabrice Pierron, Gilles Lérondel

Abstract: This work deals with the development of a full-field extensometric method at a micrometric scale in order to precisely identify the local...

181
Authors: Robert J. Hocken, R. Fesperman, J. Overcash, O. Ozturk, C. Stroup

Abstract: Nanotechnology can be defined as “the study, development and processing of materials, devices, and systems in which structure on a...

3
Showing 1 to 10 of 37 Paper Titles