Papers by Keyword: MEMS

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Authors: Chao Sun, Zai Fa Zhou, Wei Hua Li, Qing An Huang
Abstract: In this paper, a direct and simple method to characterize the elastic modulus of individual layers for composite films by in situ measuring of MEMS test structures is presented. The structure is composed of a set of microactuators which contains a rigid plate with two supporting composite beams. A model is developed to describe analytically the relationship between the force and the deflection of microactuators by electrostatic measurements, and the elastic modulus of multi-layered beams with different widths are evaluated. FEM simulations are implemented to validate the accuracy of the relationship between the on-load voltage and the capacitance between the microactuator and the electrode on the substrate. Test structures are fabricated using CMOS-MEMS process and experiments are to be carried out soon.
Authors: Ying Jun Chen, Yan Mei Li, Qing Hua Chen, Wen Gang Wu
Abstract: A 1×6 compound-driven MEMS-based optical device with optical switch and variable optical power attenuating functions has been proposed to optimally serve multifunctional optical fiber-based networking applications. The device manipulates the light with binary-slope mirrors driven by compound electrostatic actuator. The optical models for attenuating are investigated. Performances of the fabricated devices assembled with ball-lensed fibers are measured and discussed. Measurements reveal that the insertion loss of the device is less than 2.7 dB and the controllable attenuation range is more than 40 dB for the switching and attenuation function, respectively.
Authors: Jean François Michaud, Marc Portail, Thierry Chassagne, Marcin Zielinski, Daniel Alquier
Abstract: The aim of this paper is to review the recent developments conducted by our groups for the achievement of 3C-SiC based heterostructures compatible for MEMS applications. It deals with different aspects, from the influence of the defects generated at the 3C-SiC/Si interface on the mechanical properties to the elaboration of new multilayered structures, required for specific applications like, for example, Atomic Force Microscopy.
Authors: Wei Min Wang, Feng Gang Tao, Jian Fei Zhang, Jun Yao
Abstract: A new hexagonal actuator arrangement continuous face-sheet MEMS deformable mirror is proposed, a mirror array with 19 elements is fabricated by a surface micromachining process. This design has a good fitting capability and a fast dynamic response. The fabricated sample is tested by an optical profiler. Simulation and test results indicate that it has a small aperture size, a high fill factor, a fast response time and a high working bandwidth. This new device provides a possibility of manufacturing a large-actuator-count DM for high speed wavefront control.
Authors: Ye Chao Sun, Zhuo Lei Huang, Wei Bing Wang
Abstract: A bandgap reference without passive components based on standard CMOS is proposed. Using an improved inverse-function technique without any curvature-compensated techniques, two reference voltages are got in different temperature ranges. One is 1.56V with a temperature coefficient of 9.2ppm/°C in the range [0, 14 °C at 3.3V supply voltage, and the other is 1.546V with 47ppm/°C in [-25, 15 °C at 3.3V. Its PSRR (power supply rejection ratio) is below-60dB at 10kHz, and it is quite suitable for integration in processing circuits of MEMS (micro-electro-mechanical systems) devices.
Authors: An Jie Ming, Yao Hui Ren, Yu Zhang, Le Zhang, Wen Bo Zhang, Zhen Xin Tan, Wen Ou, Qiu Lin Tan, Hai Yang Mao, Ji Jun Xiong, Da Peng Chen
Abstract: Many gas molecules absorb electromagnetic radiation at characteristic wavelengths in the infrared region. This absorption can be used to identify defined substances like CO2, ammoniac, and so far. This study presents a comparative analysis of parameters of infrared radiation source and detector hardware that are most important for the creation of portable optical nondispersive infrared (NDIR) gas sensors. One of the central issues in the design of this kind of sensors is the geometry of the sensor cell. In this paper we investigate an asymmetry sensor cavity and predict the performance using Tracepro software. Then, the CO2 sensor is made and tested.
Authors: Jun Mizuno, Satoshi Takahashi
Abstract: In this paper, design, fabrication and characterization of a double-sided in-plane lateral comb-drive actuator fabricated by a plaster-based 3D-printer is described. The design is based on MEMS (Micro Electro-mechanical Systems) design concept. The movable part of the actuator consists of a (10x52.5) mm rectangular plate, and the end sides have depression areas in order to fit a (0.5x21.3) mm beam-shaped hinges. In the remaining sides of the plate, 18 comb fingers (0.5x10) mm are set at each opposite side. The stationary part of the actuator consists of 17 comb fingers with the same dimension to that of the stationary ones, and they are set at both sides of a frame and interdigitated with the movable comb fingers on the same plane. The gap between the movable and stationary comb fingers is 1.0mm. The structure thickness is 1.5mm. Such a structure, which both sides are provided with an in-plane interdigitated comb fingers, is called double-sided in-plane lateral comb-drive actuator. This actuator has been fabricated by using a plaster-based 3D-printer. Since plaster composite is an electrical insulating material, the structure has been suitably masked and the upper and lateral surfaces have been metallized thereafter by Au ion sputtering for the actuator electrodes formation. The hybrid fusion of 3D-printing manufacturing technology and MEMS-based design concept has been recently proposed by the authors and named as SMEMS (Sub-milli Electro-mechanical Systems), since the smallest possible fabrication size is in the order of sub-millimeters. The advantage of SMEMS technology is the quick and easy fabrication of 3D structures from 3D-CAD data. Furthermore, SMEMS is completely environment-clean since any hazardous chemicals or gases are used. The actuator has been driven by differential voltages, where both sides are biased at a voltage of 100V, and a 200 Vpp and its 180°shifted sinusoidal voltages are applied at each side. The actuator laterally moved by 96.8μm (full width) at a resonance frequency of 72Hz, and the mechanical quality factor has been estimated to be about 10.
Authors: Mao Bo Fang, Xiao Lin Zhao, Jian Hua Li, Zi Wang, Yan Fang Wang, Zhong Yu Hou
Abstract: A kind of ionization gas sensor based on the polarization structure was designed and manufactured by MEMS technology. The gas sensor device consists of 3 main parts: the anode electrode, the cathode and the distributed polarization structure array which lie between the former two parts. All parts were coated with ZnO nanorods by a two-step hydrothermal method. Different concentration acetone gas was tested using the device. The results support that the ionization gas sensors exhibit reasonable sensitivity and good repeatability at the applied voltages lower than 4V.
Authors: Ting Ting Wang, Yi Bo Zeng, Zu Guang Zhao, Hang Guo
Abstract: Micro direct formic acid fuel cell (DFAFC) is currently one of the promising technologies to power micro/nano devices and systems. Compared with micro direct methanol fuel cell (DMFC), micro (DFAFC) can have higher proton conductivity and energy density, and crossover of formic acid through Nafion membrane is significantly less than methanol. In this paper, a micro DFAFC has been developed. Polydimethylsiloxane (PDMS) is chosen as the material for fluid flow plates in both cathode and anode of the micro DFAFC in order to simplify its structure and improve its packaging performance. The developed micro DFAFC has been tested and results show that its input concentration of formic acid solution can reach up to 10mol/L with its peak power output of 13.6mW/cm2 and maximum output current of 97.66mA/cm2.
Authors: Ya Xin Liu, Xiu Shan Song, Yu Feng Yao, Bo Huang, Ming Zhong
Abstract: Considering the long-term, flexible blood glucose monitoring demand, a sensor monitoring system for interstitial fluid (ISF) ultrafiltration sampling and on-line monitoring of blood glucose is presented. In this paper, the glucose sensor chip used in this system will be introduced in detailed. This sensor chip was developed by MEMS technique and it has the advantages of less ISF consumption, smaller structures and easier integration. Otherwise, the silicon glucose sensor chip is provided with diffusion control of the analyte through a porous silicon membrane into a silicon etched cavity containing the agarose immobilised enzyme. First, glucose monitoring principle of this sensor system will be intrudouced briefly. Then, this paper focuses on the design and fabrication of the key component, which is the MEMS sensor chip with diffusion control. Finally, experiments were carried out, and results show that the sensor chips signal response time at increasing glucose concentrations is about 5s; The linear range is large enough to cover the required broad area of blood glucose (0.2 ~ 20 mmol / L), the sensitivity is 9.76 nA/mmol.L-1, and the correlation coefficient is 0.9954. In addition, experiments results of sensor chip with different pore membrane were compared with each other. We can see that different measuring range and sensitivity can be obtained, which agrees with the theoretical analysis.
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