Papers by Keyword: Micro-Electromechanical System (MEMS)

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Authors: Christopher Locke, G. Kravchenko, P. Waters, J. D. Reddy, K. Du, A.A. Volinsky, Christopher L. Frewin, Stephen E. Saddow

Abstract: Single crystal 3C-SiC films were grown on (100) and (111) Si substrate orientations in order to study the resulting mechanical properties of...

633
Authors: M. Rizwan Malik, Tie Lin Shi, Zi Rong Tang, M. Haseeb

Abstract: Much of the recent ongoing advanced research into the quest for improved etching techniques has brought forth a broad concept for the...

59
Authors: Xue Hua Tang, Zheng You, Yong Jun Yang, Hong Tao He

Abstract: In this paper, a comb-driving tunneling magnetometer based on the tunneling effect is introduced. The designation, manufacture and tests of...

561
Authors: Chong Du Cho, Heung Shik Lee, Chang Boo Kim, Hyeon Gyu Beom

Abstract: In this paper, a finite element code especially for micro-magnetostrictive actuators was developed. Two significant characteristics of the...

1151
Authors: Li Bo Zhao, Xu Dong Fang, Yu Long Zhao, Zhuang De Jiang, Yong Li

Abstract: A pressure sensor in the range of 25 MPa with circular diaphragm is designed and fabricated, and the calibration experiments prove its...

206
Authors: Yun Kui Zhang, Feng Cui, Zhen Wan, Kai Li, Wu Liu, Wei Ping Zhang

Abstract: In this paper, differential capacitors sandwiched structure of a high-G capacitive microaccelerometer with round metal proof mass supported...

1843
Authors: Li Bo Zhao, En Ze Huang, Gui Ming Zhang, Yu Long Zhao, Xiao Po Wang, Zhuang De Jiang, Zhi Gang Liu

Abstract: A kind of fluid density sensor based on MEMS (Micro-Electro-Mechanical-System) technology is introduced with trapezoidal cantilever...

374
Authors: Wei Wang, Wei Guo Liu, Jin Long Zou, Peng Fei Huo

Abstract: In order to realize the miniaturization of fuze safety mechanism, a novel MEMS safe and arm is proposed through concept, analysis, design...

4593
Authors: Jun Hui Ni, Bei Zhi Li, Jian Guo Yang

Abstract: This paper presents a novel low-cost poly(dimethylsiloxane) (PDMS) micropump with simple planar design featuring use of compliant in-contact...

1574
Authors: Shao Peng Liu, Zhao Ying Zhou, Qiong Wang, Qi Guo, Zhi Guang Ma

Abstract: One wireless attitude measurement system based on a MEMS multi-sensor has been developed. The data from 3-axis MEMS accelerators and 3-axis...

2274
Showing 1 to 10 of 330 Paper Titles