Papers by Keyword: Microelectromechanical Systems (MEMS)

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Authors: Kosuke Sato, Kohei Adachi, Hajime Okamoto, Hiroshi Yamaguchi, Tsunenobu Kimoto, Jun Suda

Abstract: We fabricated electrostatically actuated single-crystalline 4H-SiC microcantilever resonators. To realize a narrow gap between cantilevers...

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Authors: Kosuke Sato, Kohei Adachi, Hajime Okamoto, Hiroshi Yamaguchi, Tsunenobu Kimoto, Jun Suda

Abstract: We fabricated electrostatically-excited single-crystalline 4H-SiC microcantilever resonators with various thicknesses and lengths. Their...

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Authors: Jun Shou Chen, Zheng You, Yong Ruan, Mu Zhi Hu

Abstract: A new isolation optimization method of radio frequency (RF) microelectromechanical systems (MEMS) capacitive switches is carried out in this...

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